1031_電漿製程_四技材工系四甲
Course Period：Now ~ 2015-10-04
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Course Intro
Course Plan
教學目標：電漿已廣泛的應用在半導體產業中。本課程的目標為使學生了解電漿的基本原理及特性，並說明電漿的實際應用。另外也針對電漿應用在半導體製程中的優缺點做分析。
Textbooks
M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, 1st Ed., John Wiley & Sons, Inc., 1994
Teacher / 黃啟賢
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