1061_半導體製程_四技材工系三甲
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Course Intro

Course Plan

教學目標:學習現今熱門的薄膜技術與基本量測手法.包含薄膜電性,物性與化性分析.介紹薄膜材料的種類與實際應用,本課程將有至少兩個實驗作業,讓學生學習各種薄膜材料的量測與理論對應,可為學生日後投入職場的重要資糧.
 Textbooks
Fundamentals of Semiconductor Fabrication
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