1062_薄膜製程_四技進修部材工系三甲
Course Period：Now ~ Any Time
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Course Intro
Course Plan
教學目標：
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薄膜製程-CH0 課程說明
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薄膜製程CH01(1/3)-真空
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薄膜製程CH01(2/3)-真空原理
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薄膜製程CH01(3/3)-真空系統
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薄膜製程CH02(1/2)-電漿原理
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薄膜製程CH02(2/2)-電漿系統
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薄膜製程-CH03電漿濺鍍
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薄膜製程-CH04電漿輔助化學氣相沉積 (1/2)
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薄膜製程-CH04電漿輔助化學氣相沉積 (2/2)
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薄膜製程-CH05薄膜蝕刻(1/2)
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薄膜製程-CH05薄膜蝕刻(2/2)
Teacher / 黃啟賢
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