2020spring_Introduction to Materials and Manufacturing_Department of Materials Engineering 1 A
Course Period：Now ~ Any Time
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Course Intro
Course Plan
教學目標：
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ch1_導論
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ch2_積體電路製程介紹
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ch3_半導體基礎
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ch4_晶圓製造
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ch5_加熱製程
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ch6_微影製程
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ch7_電漿製程
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ch8_離子佈植製程
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ch9_蝕刻製程
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ch10_化學氣相沉積與介電質薄膜
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ch11_金屬化製程
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ch12_化學機械研磨製程
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ch13_半導體製程整合
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ch14_IC製程技術
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ch15_半導體製程發展趨勢和總結
Teacher / 彭坤增
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