2020spring_Introduction to Materials and Manufacturing_Department of Materials Engineering 1 A
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Course Intro

Course Plan

教學目標:
  • MP_1_Week 1_材料基本概念及製程簡介
  • MP_2_Week 2-3_無塵室技術及微影製程
  • MP_3_Week 4-6_真空技術
  • MP_4_Week 7-8_溫度氣體控製及加熱製程
  • MP_5_Week 9_晶圓製造、離子佈植及蝕刻(補充資料)
  • MP_6_Week 10-12_電漿製程
  • MP_7_Week 13-14_物理氣相沉積技術及金屬化製程
  • MP_8_Week 15-16_化學氣相沉積技術
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2021fall_Practice of optoelectronic materials_Department of Materials Engineering 2 A
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