1091_電漿製程_四技材工系四甲
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Course Intro
Course Plan
教學目標：
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ch1_真空原理
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ch2_電漿原理
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ch3_電漿輔助化學氣相沉積
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ch4_電漿濺鍍
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ch5_電漿蝕刻
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ch6_電漿損傷
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ch7_低損傷電漿製程
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ch8_電漿診斷
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Chap8_化學氣相沉積
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Intro to sputtering (process to create clear, conductive coatings)
Teacher / 陳政營
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