2020spring_Thin Film Processing_Department of Materials Engineering 3 A
Course Period：Now ~ Any Time
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Course Intro
Course Plan
教學目標：
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FePt合金薄膜之高功率脈衝磁控濺鍍製程開發及光電元件應用
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CuxO氧化物薄膜之高功率脈衝磁控濺鍍製程開發及光電元件應用
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NiO氧化物薄膜之高功率脈衝磁控濺鍍製程開發及光電元件應用
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Cu3N氮化物薄膜之高功率脈衝磁控濺鍍製程開發及光電元件應用
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Epitaxy Structure
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Film Structure
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Film Formation
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Zn-Sb合金薄膜的顯微結構與電性質
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2021 03 05 ALD ALE Introduction & Their Application
Teacher / 陳勝吉
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